for low temperature scanning Hall probe microscopy
The MagCam high resolution and ultra high resolution e-beam scanning Hall probes are optimized for liquid helium temperature scanning Hall probe microscopy (LT SHPM).
They contain an e-beam written deep sub-micrometer sized Hall effect sensor at one of the chip corners, very close to the physical chip edge. The sensors are manufactured from a high-quality MBE-grown GaAs/AlGaAsIII-V semiconductor heterostructure. Due to advanced band engineering this material contains a two-dimensional electron gas (2DEG) with superior electron mobilitiesat liquid helium temperatures.
The MagCam scanning Hall probes are manufactured in state-of-the-art clean room facilities using a dedicated process flow.