high resolution scanning Hall probes (CSHP-400 & CSHP-250)

for low temperature scanning Hall probe microscopy

The MagCam high resolution and ultra high resolution e-beam scanning Hall probes are optimized for liquid helium temperature scanning Hall probe microscopy (LT SHPM).

They contain an e-beam written deep sub-micrometer sized Hall effect sensor at one of the chip corners, very close to the physical chip edge. The sensors are manufactured from a high-quality MBE-grown GaAs/AlGaAsIII-V semiconductor heterostructure. Due to advanced band engineering this material contains a two-dimensional electron gas (2DEG) with superior electron mobilitiesat liquid helium temperatures.

The MagCam scanning Hall probes are manufactured in state-of-the-art clean room facilities using a dedicated process flow.


  • Optimized MBE-grown GaAs/AlGaAsIII-V heterostructure material
  • High electron mobility 2DEG: 150000 cm2/Vs (at 4 Kelvin)
  • High magnetic field sensitivity: 1500 V/AT (at 4 Kelvin)
  • Sub-micrometer sized e-beam written Hall effect sensor near physical chip edge
  • Two-stage tunneling tip for probe-sample distance control
  • Chip size: 3mm x 3mm
  • Manufactured in the state-of-the-art cleanroom facilities of IMEC


  • Low temperature magnetic field imaging
  • Magnetic research on magnetic and superconducting micro-and nanomaterials

- Microscope image of the probe tip
- SEM image of the 250nm sized Hall cross (insert)

3-axis Scanner

High speed 3-axis scanner

Rotor Inspector

High-speed Rotor Inspector


Magcam is a high tech company offering the unique Magnetic Field Camera technology, as well as specialty cryogenic Hall sensors.

Applications include quality control of small permanent magnets and magnetic assemblies, magnetic R&D, materials research and more.

Magcam's customers include (automotive) sensor manufacturers, magnet producers, magnet suppliers, motor/generator constructors, universities, research labs and more.

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